A Nanomechanical Analysis of Deformation Characteristics of 6H-SiC Using an Indenter and Abrasives in Different Fixed Methods

A Nanomechanical Analysis of Deformation Characteristics of 6H-SiC Using an Indenter and Abrasives in Different Fixed Methods

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The super-precise theory for machining single crystal SiC substrates with abrasives needs to be improved for its chemical stability, extremely hard and brittle.A Berkovich indenter was used to carry out a systematic static stiffness indentation experiments on single crystal 6H-SiC substrates, and then these substrates were machined by utilizing fixed, free, and semi-fixed abrasives, WATER VIOLET and the nanomechanical characteristics and material removal mechanisms using abrasives in different fixed methods were analyzed theoretically.The results indicated that the hardness of C faces and Si faces of single crystal 6H-SiC under 500 mN load were 38.596 Gpa and 36.246 Gpa respectively, and their elastic moduli were 563.

019 Gpa and 524.839 Gpa, respectively.Moreover, Laundry All-in-One the theoretical critical loads for the plastic transition and brittle fracture of C face of single crystal 6H-SiC were 1.941 mN and 366.8 mN, while those of Si face were 1.

77 mN and 488.67 mN, respectively.The 6H-SiC materials were removed by pure brittle rolling under three-body friction with free abrasives, and the process parameters determined the material removal modes of 6H-SiC substrates by grinding with fixed abrasives, nevertheless, the materials were removed under full elastic-plastic deformation in cluster magnetorheological finishing with semi-fixed abrasives.